Customized Precision High Purity Alumina Ceramic Robot Arm for Semiconductor
Specification of the ceramic robot arm:
1. Material options: 99~99.8% alumina(Al2O3), Zirconia (ZrO2), Silicon carbide (SiC), Silicon nitride (Si3N4)
2. Forming method: ISO pressed, Dry pressed, Ceramic injection molding, Hot pressed and Extrusion and so on
3. Type of ceramic parts: ceramic arm, ceramic frame, ceramic tube, ceramic ring, ceramic rod, ceramic housing, ceramic cap
4. Specification: Available outer from 1mm to 500mm, available length from 10mm to 1000mm
5. Surface treatment: polishing to be diamond-like surface, glazing, metallizing for ceramic to metal bonding
The accuracy achieved after precision machining
(1) Axis: roundness 0.002 mm, concentricity 0.002 mm, smoothness Ra0.1;
(2) Hole: the minimum processing hole diameter is 0.2 mm and the depth is up to 6 mm (depending on the material);
(3) Slot: min. value to be 0.1 mm of narrow groove, and grooves with custom shapes;
(4) Plane: 0.1mm sheet with minimum processable thickness, parallelism 0.001mm, measurement tolerance 0.001 mm, finish Ra0.1;
(5) Thread: The minimum machinable M2 internal thread, the accuracy of GB-7h, the external thread size is not limited, the accuracy is GB-6g
Prime features of alumina ceramic robot arm:
1. Wear & abrasion resistance: Alumina is extreme hard technical ceramic with superb wear resistance
2. High-temperature ability: withstand up to 1650°C in oxidizing and reducing atmospheres
3. Chemical inertness, resistant most of the strong acid and alkali, and does not rust forever
4. Electrical insulation: The insulation breakdown is up to 18KV at least
5. Great mechanical properties, hardness, compressive and flexural strength are much higher stainless steel
6. Chemical corrosion resistance under high temperature, even if with strong acid or alkali
7. Protective atmospheres or high vacuum at high-temperature to eliminate contamination or impurity.
8. Low material cost in high-level applications than other technical ceramics
Description of high precision ceramic robot arm:
The ceramic arm we supplied is made from high purity alumina ceramic materials and formed by cold isostatic pressing, cured by high-temperature. Then it will do further machining process and make the tolerance of key dimensions to +/- 0.001mm, the surface finish to Ra0.1. We manufacture our ceramic arm with unique ceramic bonding technology. Ceramic arms with hollow design can work in high temperature of 800 degrees after bonded
We offer a selection of purities ranging from 95 – 99.8%. Our factory has access to many different types of shaping methods, including dry pressing, ISO pressing, ceramic injection molding, tape casting, hot pressing and extruded.
Alumina ceramic is characterized by high hardness, wear resistance, low erosion levels, high-temperature resistance, corrosion resistance, and chemical stability. Furthermore, it can be highly polished making it a mirror surface to reduce friction at the fitting, working status. So alumina ceramic parts are extensively used in medical, electronic, electrical, machinery, chemistry, new energy, military, aerospace and so on.
The application of alumina ceramic parts:
Due to high purity alumina versatile characteristics, high precision alumina ceramic parts are widely used as ceramic mechanical seals, ceramic semiconductor parts, ceramic machine components, electrical ceramic insulators, ceramic waveguides, ceramic measuring components, fiber optical application.
Gallery of alumina ceramic parts
We produce various different grade alumina ceramic parts with complicated design.
Datasheet of Technical ceramics
| Property | Units | Material |
| 99.5% alumina | 99%alumina | 95% alumina | ZrO2
(Y-TZP) | ZrO2 (TTZ) |
| Density | g/cm3 | ≥3.85 | ≥3.80 | ≥3.60 | ≥5.95 | ≥5.72 |
| Water absorption | % | 0 | 0 | 0 | 0 | 0 |
| Hardness | HV | 1700 | 1700 | 1500 | 1300 | 900 |
| Flexural strength | Mpa | ≥379 | ≥338 | ≥320 | ≥1200 | ≥1200 |
| Compressive strength | Mpa | ≥2240 | ≥2240 | ≥2000 | ≥1990 | 1750 |
| Fracture toughness | Mpa m1/2 | 4-5 | 4-5 | 3-4 | 6.5-8 | 11 |
Max. service
temperature | ℃ | 1675 | 1600 | 1450 | 1000 | |
| CTE | 1×10 -6 /℃ | 6.5~8.0 | 6.2~8.0 | 5.0~8.0 | 8.0~9.5 | 10.2 |
| Thermal shock | T(℃) | ≥250 | ≥200 | ≥220 | ≥300 | 350 |
| Thermal conductivity(25℃) | W/m.k | 30 | 29 | 24 | 3 | 3 |
| Volume resistivity | ohm.cm | | | | | |
| 25℃ | ＞1 x 10 14 | ＞1 x 10 14 | ＞1 x 10 14 | ＞1 x 10 11 | ＞1 x 10 11 |
| 300℃ | 1 x 10 12 | 8 x 10 11 | 10 12 -10 13 | 1 x 10 10 | 1 x 10 10 |
| 500℃ | 5 x 10 10 | 2 x 10 9 | 1 x 10 9 | 1 x 10 6 | 1 x 10 6 |
| Insulation strength | KV/mm | 19 | 18 | 18 | 17 | 20 |
| Dielectric constant(1Mhz) | (E) | 9.7 | 9.5 | 9.5 | 29 | 28 |
Manufacturing flow chart of technical ceramic parts
We have in-housing comprehensive manufacturing types of equipment, including forming, sintering, CNC machining,
precision grinding, laser cutting and so on, it helps us to control the quality very well, also it greatly benefits cost control.
Packaging proposal and transportation solutions
1. We will keep the ceramic parts inside the inner package to be fixed without moving, then it will prevent them from collision each other,
to avoid any cause any chippings during transportation.
2. In addition, the inside of the outer carton will be filled with sufficient protective kinds of stuff.
Why choose us?
★ 10+ Years of manufacturing experience in OEM, ODM ★ Powerful R&D, mass production capability
★ In-house comprehensive manufacturing types of equipment ★ Rigorous quality control system and processes
★ Surpassing pre-sales and after-sales service ★ Abide all orders as the first priority
FAQs(Frequently asked questions)
Q1. Are you a factory or trading company?
A: We are a manufacturer. You are welcome to visit our factory.
Q2: Do you send a sample to check?
A: Sure, the sample is free and freight collect.
Q3: When will you ship it?
A: If the products are in storage, we'll ship within 48 hours
Q4: When can I get the price?
A: We regularly quote within 24 hours after we get your inquiry. If you are in urgent need of getting the price.
Please call us or tell us in your email so that we will proceed with your inquiry as a priority.
Q5: Is it available to provide customized products?
A: We always support custom-made demand as per different materials, dimensions, and designs.
Q6: How to ensure quality?
A: The dimension out of any batch will be carried out sampling inspection per international AQL standard. A 100% cosmetic inspection will be done.
Q7: What other products are you dealing with?
A: We focus on a variety of ceramic tubes, ceramic substrates, ceramic sheets, textile ceramics besides metalized ceramics.
